论文部分内容阅读
实验分析了离子束加工去除函数的工艺可控性问题并进行了初步修形实验。从工艺实现的角度分析光学镜面离子束加工技术对去除函数的要求,以去除函数环半峰全宽、体积去除率和峰值去除率为评价指标研究去除函数的长时稳定性、线性性、小扰动鲁棒性以及大参数调节变化等特征,以此分析结果为依据,对Φ100mm K4平面样件进行了修形,经过三次迭代面形RMS误差从0.149λ收敛到0.013λ。实验结果表明:离子束加工中的去除函数具有较长时稳定性,去除量对时间具有线性关系,对工艺参数小扰动的鲁棒性,可以通过调节离子源电源参数优化选取去除函数的宽度和幅值;利用离子束可以对镜面进行高效地修形。
The process controllability of ion beam machining removal function was experimentally analyzed and a preliminary modification experiment was carried out. From the point of view of process realization, the requirement of removing function for optical mirror surface ion beam processing technology is analyzed. The full width at half maximum (FWHM), volume removal rate and peak removal rate of the functional ring are taken as evaluation indexes to study the long time stability, linearity and small Perturbation robustness and large parameter adjustment and other characteristics. Based on the analysis results, the Φ100mm K4 flat specimen was repaired, and the RMS error of the three iteration surface shapes converged from 0.149λ to 0.013λ. The experimental results show that the removal function in ion beam processing has a long time stability and the removal amount has a linear relationship with time. For the robustness of the small disturbance of process parameters, the width of the removal function can be optimized by adjusting the power supply parameters of the ion source Amplitude; the use of ion beam mirror can be efficiently modified.