大规模集成电路可变矩形电子束曝光机对温度、微束流等项测量提出了较高的要求。因此,我们已研制了分辨率为0.05℃的精密温度测量仪。为在变形束曝光机中实现自动温度和微束流测量,我们又研制了精密温度和微束流测量数据采集系统。实验证明,本系统的性能已达到设计要求。 Large-scale integrated circuit variable rectangular electron beam lithography temperature, micro-beam and other measurements put forward higher requirements. Therefore, we have developed a precision temperature measuring instrument with a resolution of 0.05 ℃. To achieve automatic temperature and microbeam measurements in a textured beam lithography machine, we have also developed a precision temperature and microbeam measurement data acquisition system. Experiments show that the performance of the system has reached the design requirements.