针对超精细加工的技术要求,叙述了离子加工应用技术的发展概况、各型号离子束刻蚀机的性能及使用效果,阐述了离子镀膜的基本原理与特点。这种镀膜对零、部件表面的保护及性能改善有重要作用。 According to the technical requirements of ultrafine processing, the development of application of ion processing technology, the performance and application effects of ion beam etching machines are described, and the basic principles and characteristics of ion plating are expounded. This coating on the zero, the surface protection and performance improvements have an important role.