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本文介绍了一种基于升压法的漏率测量装置,通过在传统升压法的基础上添加标准室,降低了测量过程中本底放气的影响,全金属密封避免了氦气的渗透,利用数据采集卡和组态王软件实现数据的连续采集和记录。装置测量了104Pa-105Pa下氦气通过测试元件的漏率,并利用检漏仪对测试结果进行了验证,相对误差在5.8%左右。本装置可以实现10~(-8)Pa m~3/s量级以下的漏率的精确测量。
In this paper, a leak rate measurement device based on the boost method is introduced. By adding a standard chamber based on the traditional boost method, the influence of background deflation during the measurement process is reduced. The all-metal seal avoids the infiltration of helium, Using data acquisition card and configuration software for continuous data acquisition and recording. The device measured the leak rate of helium through the test component at 104Pa-105Pa, and used the leak detector to verify the test results. The relative error was about 5.8%. The device can realize the accurate measurement of the leakage rate below the order of 10 ~ (-8) Pa m ~ 3 / s.