论文部分内容阅读
本文根据激光光源相干性能,使激光束垂直投射到物面上凸、凹不平及刻线处将产生衍射现象的原理,对物面上这种标记的啦置尺寸进行精确测量。文中介绍了测量装置的三个组成部分:激光扫描系统;信号检测系统和对准观察系统,并着重介绍了对正常反射的光信号和衍射时的零频光信号截止的空间滤波器以及F—Q透镜在测量系统中的作用。最后还分别对影响精度的五种因素作了详细的分析,证明这种方法对测量小尺寸能获得良好的效果
In this paper, according to the coherence of laser light source, the principle that the laser beam is projected onto the surface of convex, concave and concave at the engraved line will be directly projected, and the accurate measurement of the dimension of this mark on the object surface will be made. This paper introduces three components of the measuring device: laser scanning system, signal detection system and alignment observation system, and focuses on the introduction of the spatial filter for the normally reflected optical signal and the zero-frequency optical signal at diffraction and the F- Q lens in the measurement system. Finally, the five factors affecting the accuracy are analyzed in detail, which proves that this method can obtain good effect on the measurement of small size