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在我们研制的光刻伺服码录写设备中,主轴伺服系统是它的重要部分,其运行的平稳性直接影响了盘片伺服图形的预刻精度。介绍了采用多闭环反馈的电机控制电路,保证了电机运行的高稳定性要求。
In our development of lithography servo code recording equipment, spindle servo system is its important part, the smoothness of its operation has a direct impact on the servo pre-engraved disc graphics accuracy. The motor control circuit with multi-loop feedback is introduced to ensure the high stability of the motor.