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光束稳定技术是光刻机照明系统中一项重要的单元技术,其作用是将激光器出射的经长距离传输后的光束稳定在需要的指向和位置上,以保证照明系统具有稳定的光强分布。光束稳定系统主要由光束测量和光束转向两个功能模块组成,推导了两个模块之间的光束传递矩阵,并基于LabView搭建了光电闭环控制实验系统。对系统性能进行了测试,通过人为引入已知光束漂移量得到如下结果:系统的指向稳态误差低于±3μrad,位置稳态误差低于±0.04mm,系统调整时间小于80ms。结果表明该系统可以精确地把光束稳定在需要的指向和位置。
Beam stabilization technology is an important element technology in the lithography system. Its function is to stabilize the light beam emitted by the laser after long distance transmission in the required direction and position, so as to ensure the illumination system has a stable light intensity distribution . The beam stabilization system is mainly composed of two functions: beam measurement and beam steering. The beam transfer matrix between the two modules is deduced. Based on LabView, an experimental system of photoelectric closed-loop control is established. The performance of the system was tested. By introducing the known amount of beam drifts, the following results were obtained: the steady-state error of the system is less than ± 3μrad, the steady-state error is less than ± 0.04mm, and the system adjustment time is less than 80ms. The results show that the system can accurately stabilize the beam at the desired orientation and position.