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为了能实现跨尺度纳米定位操作,研制了一个基于粘滑驱动机理的纳米定位平台。采用柔性铰链的驱动机构,在对其在垂直方向上和驱动方向上的刚度进行分析的基础上,进行尺寸优化,从而减少定位平台在垂直方向产生耦合运动。致动器采用叠堆型压电陶瓷,实验分析发现压电陶瓷驱动器在有预紧力作用下,实际位移输出小于标称位移,当预紧力越大时,压电陶瓷的实际输出位移越小。在导向方面,采用双列交叉滚柱导轨,实现了载物台的多样化设计,从而提高了定位平台的适用性。同时结合LuGre摩擦模型对定位平台进行了动力学分析,优化其结构设计。单自由度粘滑驱动纳米定位平台的最大尺寸为28 mm×34 mm×12 mm,具有10 nm的分辨率、0.021 mm/s的速度和10 mm的行程。
In order to realize the nanoscale positioning operation, a nano-positioning platform based on stick-slip driving mechanism was developed. Based on the analysis of the stiffness in the vertical direction and the driving direction, a flexible hinge driving mechanism is used to optimize the size so as to reduce the vertical movement of the positioning platform. Actuator stack type piezoelectric ceramics, the experimental analysis found that piezoelectric actuators in the pre-tightening force, the actual displacement output is less than the nominal displacement, when the pre-tightening force is greater, the actual displacement of the piezoelectric ceramic displacement small. In terms of guidance, the use of double-row crossed roller guide rail, to achieve a diversified design of the stage, thereby enhancing the suitability of the positioning platform. At the same time, the dynamic analysis of the positioning platform with LuGre friction model is carried out to optimize its structural design. The single-dimensional stick-slip drive nano positioning platform has a maximum dimension of 28 mm × 34 mm × 12 mm with a resolution of 10 nm, a speed of 0.021 mm / s and a stroke of 10 mm.