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文中简要介绍了供第二代热象仪使用的碲镉汞混合焦平面的基本制备工艺及目前的进展状况。碲镉汞混合焦平面是用作红外探测的碲镉汞列阵及用作信号处理CCD的集成器件,它是目前世界公认的最有前途的红外器件。由于战术和战略的迫切需要,该器件的研制得到了军方的大力支持,混成焦平面技术发展迅速并日趋完善。最后指出了尚存在的问题及今后的努力方向。
This paper briefly introduces the basic preparation technology and current progress of the hybrid HgCdTe coke plane for the second generation thermal imager. HgCdTe hybrid focal plane is used for infrared detection of HgCdTe array and used as a signal processing CCD integrated device, it is currently the world’s most promising infrared devices. Due to the urgent need of tactics and strategy, the development of this device has been strongly supported by the military. The technology of mixed-focal plane has developed rapidly and is getting more and more perfect. Finally pointed out the existing problems and the direction of future efforts.