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为研究深度和载荷2种加载控制模式对样品硬度和杨氏模量测试结果的影响,选取了厚度为6μm的电沉积镍薄膜为样品,采用美国Hysitron公司生产的TriboIndenter型压痕仪进行压痕试验.结果表明:因薄膜和基底2种材料的性能相差较大,随着压痕深度的增加,基底效应越来越明显;载荷控制模式下所测的硬度和杨氏模量较深度控制模式的都要大,且两性能参数中因应力松弛效应的影响硬度差别更为明显.
In order to study the influence of depth and load on the test results of hardness and Young’s modulus of two kinds of loading control modes, the electrodeposited nickel film with a thickness of 6μm was selected as the sample, and the indentation was performed by using a TriboIndenter impressor manufactured by Hysitron Company of America The results show that the substrate effect becomes more and more obvious with the increase of indentation depth due to the great difference in the properties of the two materials between the film and the substrate. The hardness and Young’s modulus measured under load control mode are deeper control modes Should be large, and the difference in hardness between the two performance parameters is more obvious due to the stress relaxation effect.