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采用射频磁控倾斜共溅射制备了一系列的(Fe40Co40B20)1-x(Al2O3)x软磁颗粒膜。分别研究了基片转速及溅射气压对FeCoB–Al2O3薄膜微波磁特性影响。并通过改变FeCoB靶以及Al2O3靶的溅射功率进一步调控了软磁颗粒膜的磁特性和电阻率。研究结果表明在基片转速为60 r/min,溅射气压为0.2 Pa,FeCoB靶的溅射功率为250 W,Al2O3靶的溅射功率为100 W时,获得的FeCoB-Al2O3软磁颗粒膜具备了优良的软磁特性、微波磁特性和较高的电阻率。薄膜的饱和磁化强度为1.73 T,易轴难轴矫顽力均小于80 A/m,电阻率为126.75μΩ·cm,共振频率高达2.22 GHz,磁导率实部在2 GHz仍大于400。
A series of (Fe40Co40B20) 1-x (Al2O3) x soft magnetic films were prepared by RF magnetron tilting co-sputtering. The effects of substrate rotation speed and sputtering pressure on the magnetic properties of FeCoB-Al2O3 films were investigated. And by changing the sputtering power of FeCoB target and Al2O3 target, the magnetic properties and resistivity of the soft magnetic particle film are further regulated. The results show that the FeCoB-Al2O3 soft magnetic granular films obtained at a substrate speed of 60 r / min, a sputtering pressure of 0.2 Pa, a sputtering power of 250 W for a FeCoB target, and a sputtering target of an Al2O3 target of 100 W Have excellent soft magnetic properties, microwave magnetic properties and high resistivity. The films show a saturation magnetization of 1.73 T and a coercive force of less than 80 A / m. The resistivity is 126.75 μΩ · cm, the resonant frequency is as high as 2.22 GHz, and the real part of permeability is still more than 400 at 2 GHz.