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薄膜中总会存在一些杂质或者缺陷,杂质和缺陷密度的有限性导致了薄膜破坏的概率性。提出了不同尺寸杂质和缺陷分布的分形特征,分析了薄膜破坏概率与辐照激光功率密度的关系,计算结果与实验结果吻合得很好。得到了一种确定薄膜中最具危害性杂质的热学特性及分布密度的方法。同时提出了杂质的敏感尺寸范围(SSR)的概念,由此得到材料激光损伤阈值的新的确定表达式,该表达式反映的损伤阈值与激光脉宽的关系更加符合实验结果。
There are always some impurities or defects in the film. The limited density of impurities and defects leads to the probability of the film being damaged. The fractal features of different sizes of impurities and defects are presented. The relationship between the probability of film failure and the laser power density is analyzed. The calculated results are in good agreement with the experimental results. A method to determine the thermal properties and distribution density of the most hazardous impurities in the film was obtained. At the same time, the concept of impurity sensitive size range (SSR) is proposed. The new deterministic expression of laser damage threshold is obtained. The damage threshold reflected by this expression is in good agreement with the experimental results.