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用射频反应溅射制备了FeTaN纳米晶软磁薄膜 .研究了薄膜结构和磁性与制备条件的依赖关系 .研究发现 ,当Ta的含量较高时 ,在N2 +Ar混合气氛中易形成沉积态薄膜的非晶结构 .适当的热处理后 ,α Fe纳米晶从中晶化生成 .薄膜显示出优良的软磁特性
The FeTaN nanocrystalline soft magnetic thin films were prepared by radio frequency reactive sputtering.The dependence of the film structure and magnetic properties on the preparation conditions was studied.The results show that when the content of Ta is high, the deposited thin films are easily formed in the mixed atmosphere of N2 + Ar Of the amorphous structure.After appropriate heat treatment, α Fe nanocrystallines from the crystallization generated.The film shows excellent soft magnetic properties