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液相外延(LPE)已成为生长高质量Ⅲ—Ⅴ族半导体外延层的一种实用的技术。本文叙述了该实验的液相外延系统、外延工艺和实验结果,并对有关的工艺和实验结果进行了讨论。
Liquid-phase epitaxy (LPE) has become a practical technique for growing high-quality III-V semiconductor epitaxial layers. This paper describes the experimental liquid phase epitaxy system, epitaxial process and experimental results, and the relevant process and experimental results are discussed.