We report the experimental results of picosecond pulse laser microstructuring (pulse duration 35ps, wavelength 1.06μm, repetition rate 10Hz) of silicon using the direct focusing technique. Arrays of sharp conical spikes located below the initial surface have been formed by cumulative picosecond pulsed laser irradiation of silicon in SF6. Irradiation of silicon surface in air, N2, or vacuum creates ripple-like pattes, but does not create the sharp conical spikes.