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氟化氢(HF)是变电站气体绝缘开关进行故障诊断的重要特征气体之一,因此HF气体的高测量精度,快速响应,实时在线检测的方法是工业和环境领域的研究重点之一.结合激光吸收光谱技术和蒙乃尔钢材加工的耐腐蚀多次反射池搭建HF检测实验系统;分析了HF气体在不同温度下的激光吸收光谱特性,根据HITRAN数据库的HF气体配分函数系数得到配分函数曲线和吸收线强曲线;在研究工作中重点设计了结合激光光谱解析和温度参数修正的浓度反演算法以实现气体浓度的准确检测;结合多次反射吸收池的温度特性利用不同浓度配比的HF样气得到连续实验结果.多次反射池加热后并稳定工作在313和323 K时,温度修正前浓度反演的最大相对误差分别为5.33％和5.87％,温度修正后浓度反演的最大相对误差分别为1.20％和1.47％.通过连续检测和计算,系统在323K时HF检出限为87×10-5 mmol·mol-1,高于290K时的检出限63×10-5 mmol·mol-1(20 m光程).尽管高温环境下温度修正后的检测误差大于室温情况,但是同一高温下温度修正后的检测误差仍低于未经过温度修正的值.通过该研究证明了本浓度反演算法工作稳定、可靠,可以满足化工生产现场HF实时监测的需求,对于我国工业HF气体的安全排放监管和环境保护起有效的技术支持.“,”Hydrogen fluoride(HF) is one of the important character gases for fault diagnosis of gas insulation switch (GIS) in the system of substation equipment .The high-accuracy,fast- response and real-time detection method of HF is a focus in industrial and environmental fields .In this research,the HF detection experiment system was set up at first based on laser absorption spectroscopy technology combined with anti-corrosion multiple reflection cell made by monel steel .More over,the laser absorption spectral characteristics of HF at different temperature were analyzed,then the coefficient partition function curve and absorption linestrength curve according to the distribution function coefficient in HITRAN database were studied .As the most important work,the concentration inversion algorithm was designed here with HF character spectrum analysis and temperature parameter correction method for accurate concentration inversion after the basic study .At last,the continuous experimental results were obtained by HF sample gases of different concentration considerating the temperature characteristic of the multiple reflection cell .When the multiple reflection cell was heat and stay stably,the biggest detection error of concentration inversion was 5.33％ and 5.87％ at 313 and 323 K respectively without temperature correction,and that was 1.20％ and 1.47％ respectively after temperature correction .By continuous detection and culculation,the detection limit is 87×10-5 mmol·mol-1 at 323 K which is a little higher than 63×10-5 mmol·mol-1 at 290 K(20 m optical length) .Although the detection error with temperature correction at high temperature was higher than it at room temperature,the results show that it w as lower than that without correction at the same temperature .It was verified t hat the this spectrum detection method and concentration inversion algorithm works stably and reliably,so this technology could realize HF real-time monitoring demand in chemical production field and it will provide the effective technical support in gas emission regulation in safety and environment protection for our country .