论文部分内容阅读
MEMS石英音叉陀螺是近年来发展起来的新型惯性器件。在石英音叉的早期设计阶段,为了提供可靠的设计方案,并缩短设计周期,应该对其进行分析模拟。音叉的结构参数至关重要,不仅会影响陀螺的敏感性,还会影响其检测精度和稳定性。本文以U形音叉为例,利用大型有限元分析软件ANSYS建立了微型石英音叉的实体模型,对其模态特性进行了分析和计算,分析了音叉几何尺寸对其谐振频率的影响,并提供了一组可供实际制作的音叉结构参数,大大缩短了设计周期。
MEMS Quartz tuning fork gyro is a new type of inertial device developed in recent years. In the early design stage of the quartz tuning fork, it should be analyzed and simulated in order to provide a reliable design solution and to shorten the design cycle. The tuning fork structural parameters are crucial, not only affect the sensitivity of the gyro, but also affect the detection accuracy and stability. In this paper, a U-shaped tuning fork is taken as an example. The solid model of the miniature quartz tuning fork is established by using the finite element analysis software ANSYS. The modal characteristics are analyzed and calculated. The influence of the tuning fork geometric dimension on the resonant frequency is analyzed. A set of tuning fork structural parameters that can be actually produced greatly shortens the design cycle.