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主要介绍了微波混合集成电路ESD设计的一些探索工作,对两种不同功能和形式的混合集成电路的抗静电能力和电路中的薄弱部位进行了研究和分析。依据实验摸底结果并结合电路的自身特点,有针对性地进行ESD保护电路设计,既有效提高了电路的抗静电能力,又保证电路的微波电性能不受较大的影响。试验结果表明,运用这种电路后,使得HE393B宽带放大器防静电能力从300 V提高到1 500 V,HE010电压产生器达到800 V。
This paper mainly introduces some explorations of the ESD design of microwave hybrid integrated circuits, and studies and analyzes the antistatic ability and the weak parts in the circuits of the hybrid integrated circuits with different functions and forms. Based on the experimental results and the characteristics of the circuit, ESD protection circuit design is targeted to both improve the anti-static ability of the circuit and ensure that the microwave electric performance of the circuit is not greatly affected. Test results show that using this circuit, making HE393B wideband amplifier anti-static ability increased from 300 V to 1500 V, HE010 voltage generator to 800 V.