随着微波半导体固体器件的进展,出现了微波电路集成化。微波集成电路已成为七十年代微电子学的发展中心,它正朝着大规模、高集成度和超高速方向发展,研究的频率范围自300兆赫至94千兆赫。它具有微型、轻量、高可靠及低成本等优点,但存在空载电路Q值低 With the progress of microwave semiconductor solid-state devices, there has been microwave circuit integration. Microwave ICs have become a center for the development of microelectronics in the 1970s. They are moving toward large-scale, highly integrated and ultra-high-speed research at frequencies ranging from 300 MHz to 94 GHz. It has the advantages of miniature, lightweight, high reliability and low cost, but there is no load circuit Q value low