在硅微波功率晶体管的研制中,由于精细的几何图形,浅结和大电流密度,制作接触电阻低而稳定性好的金属化系统已成为器件得到良好的电性能和保证长期可靠工作的关键。硅器件中惯用的单一铝系统已难以满足要求。目前,较多的应用了金系统。金作为导 In the development of silicon microwave power transistors, the fabrication of metallization system with low contact resistance and good stability due to the fine geometry, shallow junction and high current density has become the key to obtain good electrical performance and long-term reliable operation of the device. The single aluminum system commonly used in silicon devices has been difficult to meet the requirements. At present, more applications of the gold system. Gold as a guide