介绍高斯分解及基于 LM算法的数值计算方法 ,并对无氢类金刚石薄膜的喇曼光谱曲线进行了分解。结果表明 ,数值计算的收敛性较好 ,数值拟合的相关系数均大于 95 % ,完全可以用于类金刚石薄膜的微观结构分析。根据分解结果可知 ,随着偏压的增加 ,D带和 G带的分布中心均向低频偏移 ,而 G带和 D带的半高宽之比呈逐渐增大趋势。这表明膜层中 sp3键的含量不断提高 ,同时键的扭曲程度不断增大 Gaussian decomposition and numerical calculation based on LM algorithm were introduced. The Raman spectra of hydrogen-free diamond-like carbon films were also decomposed. The results show that the convergence of numerical calculation is good, and the correlation coefficient of numerical fitting is more than 95%, which can be used to analyze the microstructure of diamond-like carbon films. According to the decomposition results, it can be seen that with the increase of bias voltage, the distribution centers of D-band and G-band shift to low frequency, while the half-height-width ratio of G-band and D-band gradually increases. This shows that the sp3 bond content in the film continues to increase, while the degree of distortion of the bond increases