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为了能有效地检测PZT驱动器纳米级的驱动位移,文章提出一种采用基于柔性铰链的多级杠杆放大原理的新型纳米位移传感器。与前三代纳米位移传感器相比,新型传感器采用差动结构以及圆筒状的外形,传感器的这种独特结构赋予其较大的机械放大比;同时,建立了其理想数学模型并计算了机械放大比。为了证明传感器的有效性,对其进行了有限元仿真分析。分析结果表明新型纳米位移传感器具有较大的应变输出,且其位移分辨率将小于3 nm。
In order to effectively detect the driving displacement of the PZT driver at nanometer level, a new type of nanometer displacement sensor based on the principle of multi-lever lever amplification based on flexible hinges is proposed. Compared with the previous three generations of nano-displacement sensors, the new sensor uses a differential structure and a cylindrical shape. The unique structure of the sensor gives it a large mechanical amplification ratio. At the same time, the ideal mathematical model is established and the mechanical amplification ratio. In order to prove the effectiveness of the sensor, the finite element simulation analysis was carried out. The analysis results show that the new nano-displacement sensor has a large strain output, and its displacement resolution will be less than 3 nm.