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本文提出了一种模糊──非线性积分调节器，采用具有38．1°相位滞后的非线性积分器，以提高系统的瞬态响应性能，消除稳态误差。并将它用于扫描电镜的控制问题。仿真结果表明，这一方法得到了较好的效果。
This paper presents a fuzzy ─ ─ nonlinear integrator, using a non-linear integrator with 38.1 ° phase lag to improve the transient response of the system and eliminate the steady-state error. And it is used for scanning electron microscopy control problems. Simulation results show that this method has achieved good results.