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微结构气敏传感器由于其微型化、低功耗、易阵列化、易智能化、易批量生产等独特优点 ,受到国内外研究者的广泛重视 .本文分析膜片型微结构气敏传感器基本单元的热学行为 ,用有限元方法模拟计算多种不同电极结构的器件功耗及工作区温度分布 ,提出了进一步降低功耗改善工作区温度均匀性的途径和方法 ,并讨论了微结构气敏传感器设计中应着重考虑的问题 .
Due to its unique advantages such as miniaturization, low power consumption, easy arraying, easy to be intelligent and easy mass production, microstructured gas sensor has attracted a great deal of attention from researchers at home and abroad.This paper analyzes the basic unit The finite element method was used to simulate the power dissipation and the temperature distribution in the work area of a variety of different electrode structures. The ways and methods to further reduce the power consumption to improve the temperature uniformity in the work area were proposed. The microstructure gas sensor Design should focus on the consideration of the problem.