论文部分内容阅读
介绍了一种新型柔性电容式湿度传感器。该柔性电容式湿度传感器采用液晶高分子聚合物(LCP)作为衬底,金属铜(Cu)作为叉指电极,聚酰亚胺(PI)作为湿度传感器的湿敏介质。LCP衬底的应用使得该传感器具有良好的柔性和可弯曲性。该柔性湿度传感器与传统硅基湿度传感器相比较具有成本低廉、结构简单、制作方便等优点。该柔性湿度传感器在25℃下的平均灵敏度为0.04%p F/%RH,最大回滞为±4.16%RH,其平均灵敏度在25℃~70℃范围内受温度影响较小。在25℃下其响应时间和恢复时间分别为36 s和39 s。该柔性湿度传感器可以应用于环境湿度检测、人工电子皮肤系统和可穿戴设备等领域。
A new type of flexible capacitive humidity sensor is introduced. The flexible capacitive humidity sensor uses liquid crystal polymer (LCP) as a substrate, copper (Cu) as an interdigital electrode, and polyimide (PI) as a humidity sensitive medium for the humidity sensor. The LCP substrate makes the sensor flexible and flexible. Compared with the traditional silicon-based humidity sensor, the flexible humidity sensor has the advantages of low cost, simple structure and convenient manufacture. The average sensitivity of the flexible humidity sensor at 25 ° C is 0.04% p F /% RH and the maximum hysteresis is ± 4.16% RH. The average sensitivity is less affected by the temperature in the range of 25 ° C to 70 ° C. The response time and recovery time at 25 ° C were 36 s and 39 s, respectively. The flexible humidity sensor can be used in environmental humidity detection, artificial electronic skin systems and wearable devices and other fields.