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纳米薄膜是纳米材料家族一个新兴的成员,由于其特征厚度介于原子以及微米量级之间且具有高比表面积,纳米薄膜展现出了与宏观材料不同的特殊性质.纳米薄膜可以进行人为的操控甚至从衬底上脱离成为独立的薄膜.纳米量级的厚度使得该薄膜容易图形化以及加工成为复杂的二维、三维微纳结构.本文综述了纳米薄膜研究领域近年来的研究成果,包括各类性质研究和潜在应用方面的探索.纳米薄膜及相应三维结构在电学、光学、磁学、微纳机电等领域的广泛应用前景将使其成为纳米材料与器件研究领域一个重要的研究方向.
Nanofilms are an emerging member of the family of nanomaterials. Due to their characteristic thickness between atomic and micrometer ranges and high specific surface area, nanofilms exhibit special properties that differ from macroscopic materials. Nanofilms can be manipulated by humans And even detached from the substrate to become an independent thin film.The nano-order thickness makes the thin film easy to pattern and process into a complex two-dimensional, three-dimensional micro-nano structure.This paper reviews the research results in recent years, including And the exploration of potential applications.Widely applied prospects of nanometer thin films and corresponding three-dimensional structures in the fields of electricity, optics, magnetism, micro-nano electromechanical and other fields will make them an important research direction in the field of nanomaterials and devices.