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声表面波反射栅脉冲压缩器件(RAC)及直列式反射栅脉冲压缩器件(ILRAC),在脉冲压缩雷达及其他一些系统中用作匹配滤波,是一种重要的模拟信号处理器件。声表面波在器件基片上的各处速度的轻微差别将会影响器件的性能。器件中的金属膜结构(叉指换能器;金属栅条,点阵等)会改变表面波速度,因而镀膜,光刻等工艺的误差将对器件的参数产生影响,最终表现为对于到达输出换能器的声表面波的相位导致误差,降低脉冲压缩输出的主副瓣比。
The SAWR and ILRAC, used as matching filters in pulse compression radars and other systems, are an important analog signal processing device. Slight differences in the speed of the SAW across the device substrate will affect the performance of the device. The metal film structure in the device (interdigital transducer; metal grating, lattice, etc.) will change the surface wave velocity, so coating, lithography and other processes will have an impact on the parameters of the device, the final performance for the arrival of output The phase of the transducer’s SAW causes errors and reduces the main and auxiliary flap ratio of the pulse compression output.