采用射频磁控溅射技术在Si(111)衬底上制备了多组分Zn O基陶瓷薄膜,利用Nd∶YAG激光器对多组分Zn O基陶瓷薄膜进行了激光冲击处理,研究了激光冲击处理对多组分Zn O基陶瓷薄膜压敏电性能的影响。结果表明,激光冲击处理后,薄膜的晶粒尺寸显著减小,表面更加平整致密。薄膜的压敏电性能得到了不同程度的改善,其中非线性系数的提高幅度最大为65.2%,压敏电压降低幅度最大为38.92%,漏电流密度降低幅度最大为30.51%。薄膜中晶粒细化,晶格畸变加强,晶界处的界面态密度激增,导致薄膜非线性系数激增,从而有效改善了多组分Zn O基陶瓷薄膜的压敏电性能。 The multi-component Zn O-based ceramic thin films were prepared on Si (111) substrates by radio-frequency magnetron sputtering. The multi-component Zn O-based ceramic thin films were laser shock treated with Nd:YAG laser. The effects of laser shock Effect of Treatment on the Piezoelectric Properties of Multi-component Zn O-based Ceramic Thin Films. The results show that after the laser shock treatment, the grain size of the film is significantly reduced and the surface is even and compact. The piezosensitive properties of the films were improved to some extent. The largest increase of nonlinear coefficient was 65.2%, the largest decrease of voltage-sensitive voltage was 38.92% and the largest decrease of leakage current density was 30.51%. The grain refinement and lattice distortion strengthen in the film, and the interface density at the grain boundary increases sharply, which leads to the non-linear increase of the film coefficient, thus effectively improving the piezoelectric properties of the multi-component Zn O-based ceramic thin film.