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提出一种激光扫描测量厚/宽度的新方法,系统由准直激光源、差动扫描转镜、接收物镜、光电接收器和智能仪表组成。准直光源发出的光束经差动扫描转镜形成差动扫描,扫描光束被待测工件反(散)射后,由接收物镜汇聚至光电接收元件,测量反(散)射光在待测工件上的持续时间,由特定公式计算出工件厚/宽度。理论分析和实验结果表明,测量结果与工件至系统之间距离无直接关系,工作稳定性好,实验最大测量误差不大于扫描激光束束腰半径。
A new method of laser scanning to measure thickness and width is proposed. The system consists of a collimated laser source, a differential scanning mirror, an objective lens, a photoelectric receiver and a smart meter. A collimated light source emits a light beam which is differentially scanned by a differential scanning mirror. The scanned light beam is reflected (scattered) by the workpiece to be measured and then converged by the receiving objective lens to the photoreceiving element to measure the anti-scattered light on the workpiece Of the duration, calculated by a specific formula workpiece thickness / width. Theoretical analysis and experimental results show that the measurement results are not directly related to the distance between the workpiece and the system, and the working stability is good. The maximum measurement error in the experiment is not greater than the beam waist radius of the scanning laser beam.