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就Si为衬底的钇钡铜氧 (分子式 :Y1Ba2 Cu3 O7-δ,δ≥ 0 5 ,简称YBCO)薄膜的半导体性质 ,及用于红外测辐射热计 (Bolometer)的探测性能进行了研究 .通过测定温度电阻系数 (TCR)和霍尔 (Hall)系数 ,并采用XRD、拉曼散射光谱等手段分析了YBCO半导体薄膜的微观结构和光谱响应特性 ,认为该薄膜是非制冷红外焦平面的新型探测元材料 .
The semiconductor properties of yttrium barium copper oxide (molecular formula: Y1Ba2Cu3O7-δ, δ≥0 5, abbreviated as YBCO) film with Si substrate and the detection performance for the infrared bolometer have been studied. The microstructures and spectral response characteristics of YBCO thin films were analyzed by means of measuring the TCR and Hall coefficients and using XRD and Raman scattering spectra. The results show that the film is a new detection method for uncooled infrared focal plane Meta material.