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介质上电润湿(EWOD)是指通过在介质层下面的微电极阵列上施加电势来控制液体和固体介质层表面之间的润湿特性.研制出了EWOD液滴产生器的原型.它采用“三明治”结构:液体被夹在上下电极之间;下极板用硅作为微电极阵列衬底、低压化学气相淀积(LPCVD)制备的Si3N4薄膜作为介质层,感应耦合等离子体化学气相淀积(ICP-CVD)制备的碳氟聚合物薄膜作为厌水层;上极板是覆盖有厌水层的透明导电玻璃板.为了得到产生液滴所需要的最小电压,对液滴产生的过程和临界条件进行了理论分析.在35V电压下实现了包围在硅油中的去离子水液滴的产生.
Electro-Wetting on Media (EWOD) refers to the control of wetting properties between the surface of a liquid and a solid dielectric layer by applying a potential across a microelectrode array beneath the dielectric layer. A prototype of the EWOD droplet generator was developed using “Sandwich” structure: liquid is sandwiched between the upper and lower electrodes; the lower plate with silicon as a microelectrode array substrate, low pressure chemical vapor deposition (LPCVD) prepared Si3N4 film as the dielectric layer, inductively coupled plasma chemical vapor deposition (ICP-CVD) fluorocarbon polymer film as a hydrophobic layer; the upper plate is covered with a hydrophobic layer of transparent conductive glass plate in order to get the minimum voltage required to generate droplets, the droplets generated by the process and The critical conditions were theoretically analyzed, and the generation of deionized water droplets surrounded by silicone oil was achieved at a voltage of 35V.