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通过在共面波导传输线上周期性地加载分布电容,外加驱动电压改变电容值,实现分布式MEMS传输线移相器。从三个方面优化了五位分布式MEMS传输线移相器的设计:一是分别设计了11.25°和22.5°两种微桥,单元在Ka波段的插入损耗均大于-0.8 dB,回波损耗均小于-15 dB,相移精度小于0.4°,新的五位移相器以2种单元、19个微桥的结构替代了传统单一单元、31个微桥的结构,可减少微桥的总数;二是CPW传输线采用折叠布局,通过共用部分地线,移相器平面尺寸减小至1.81 mm×3.84 mm,相比传统五位分布式移相器,面积减小了56%,实现了器件的小型化;三是设计了一种新型的直流偏置结构,结构简单、工艺容易实现。
By distributing the distributed capacitance on the coplanar waveguide transmission line periodically and applying the driving voltage to change the capacitance value, the distributed MEMS transmission line phase shifter is realized. The design of five distributed MEMS transmission line phase shifters is optimized in three aspects: First, the two kinds of micro-bridges with 11.25 ° and 22.5 ° are designed respectively, the insertion loss of the element in the Ka band is greater than -0.8 dB, the return loss Less than -15 dB, and phase-shift accuracy less than 0.4 °, the new five-phase shifter replaces the traditional single unit and 31 micro-bridge structures with two types of micro-bridges and 19 micro-bridges to reduce the total number of micro- CPW transmission line is folded layout, by sharing part of the ground, the phase shifter reduces the planar size to 1.81 mm × 3.84 mm, compared to the traditional five-bit distributed phase shifter, the area is reduced by 56%, to achieve a small device Thirdly, a new type of DC bias structure is designed. The structure is simple and the process is easy to realize.