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使用直流磁控溅射技术,在彩色膜衬底上室温制备出粘附性良好的氧化铟锡(ITO)透明导电薄膜。X光衍射(XRD)和原子力显微(AFM)分析表明,室温ITO为多晶态,薄膜具有很好的透过率和良好的导电特性,方块电阻为120Ω/□,对应ITO/彩色膜复合膜在450nm的蓝(B)光、530nm的绿(G)光、630nm的红(R)光处的峰值透过率均达到85%左右。彩色膜与ITO电极的形成及联接等加工工艺有良好的相容性。对该技术在彩色液晶显示(LCD)和彩色有机发光显示(OLED)中的应用,进行了探索。
Using DC magnetron sputtering technology, a good adhesion of indium tin oxide (ITO) transparent conductive film was prepared on a color film substrate at room temperature. X-ray diffraction (XRD) and atomic force microscopy (AFM) analysis showed that the room temperature ITO is polycrystalline, the film has good transmittance and good electrical conductivity, the sheet resistance is 120Ω / □, corresponding to the ITO / color film composite The films all reached about 85% peak transmittances at 450 nm of blue (B) light, 530 nm of green (G) light and 630 nm of red (R) light. Color film and ITO electrode formation and connection processing technology has good compatibility. The application of this technology in color liquid crystal display (LCD) and color organic light emitting display (OLED) has been explored.