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利用以溶胶-凝胶法为主的湿化学法制备了ZnO/SnO_2前驱溶液墨水,并利用喷墨打印功能薄膜技术实现在银钯叉指电极衬底上制备ZnO/SnO_2不同混合比例的金属氧化物气敏薄膜元件。通过XRD,SEM对气敏薄膜进行结构分析和形貌观察。利用气敏检测装置研究了不同复合比例的气敏薄膜元件阻温特性及其对乙醇的气敏特性。实验表明,增加薄膜喷墨打印次数可降低薄膜电阻,喷打5次的薄膜可得到性能较好的连续膜。在工作温度250℃时,Zn/Sn摩尔比例为4:1的复合薄膜对乙醇气体显示出最佳气敏响应。
The ZnO / SnO 2 precursor solution inks were prepared by the wet-chemical method, which was mainly composed of sol-gel method. The metal oxide films with different mixing ratios of ZnO / SnO 2 were prepared on the silver-palladium interdigital electrode by ink jet printing Gas sensor film components. The structure and morphology of gas-sensing films were observed by XRD and SEM. The gas-sensing properties of gas-sensing thin film elements with different composite ratios and their gas-sensing properties to ethanol were studied by gas-sensing device. Experiments show that increasing the number of film inkjet printing can reduce the sheet resistance, 5 times the film is sprayed to get a better performance of the continuous film. At working temperature of 250 ℃, the composite film with Zn / Sn mole ratio of 4: 1 showed the best gas-sensing response to ethanol gas.