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采用微弧氧化技术在工业纯Ti板表面沉积了BaTiO3薄膜,利用XRD、SEM、EPMA表征了薄膜表面及截面的物相组成、截面结构以及截面元素分布情况,并利用电容探测仪检测了薄膜的介电性能。结果表明:薄膜表面和截面均主要由四方相BaTiO3组成;薄膜截面可分为过渡层、致密层和疏松层,但各层元素含量不同;微孔的存在导致Ba、Ti、O三种元素在截面区域内的分布出现突变;测得薄膜在100 Hz下的介电常数和介质损耗分别为227.3和0.043。
The micro-arc oxidation technology was used to deposit BaTiO3 thin film on the surface of industrial pure Ti plate. The phase composition, cross-section structure and cross-section distribution of the film were characterized by XRD, SEM and EPMA. Dielectric properties. The results show that the film surface and cross section mainly consist of tetragonal phase BaTiO3. The film cross section can be divided into transitional layer, compact layer and loose layer, but the content of elements in each layer is different. The presence of micropores leads to the formation of BaTiO3 The distribution of the cross-section changes abruptly. The dielectric constant and dielectric loss of the film measured at 100 Hz are 227.3 and 0.043, respectively.