论文部分内容阅读
为满足等离子体离子辐照和复合表面改性处理技术的发展,提出了基于Marx发生器,通过调节驱动信号延时,实现放电IGBT开关不同时导通,从而获得阶梯型脉冲高压输出的电路设计思想,并验证了其可行性。试验结果显示,该电路可输出脉冲峰值电压10 kV,峰值电流30 A,脉冲宽度3~30μs,脉冲频率20~500 Hz,最大电压阶数10阶的高压脉冲。1个原边、10个副边结构的驱动高压隔离变压器及延时驱动电路结构紧凑,抗干扰能力强。IGBT驱动反向偏置脉冲电压能够满足IGBT快速关断和过流保护的要求。等离子体负载下电路特性测试结果表明,该电路能够适应实际的工作环境,为复合处理技术的发展提供技术支持。该电路结构通过Marx单元叠加可以拓展到更高的脉冲电压输出。
In order to meet the development of plasma ion irradiation and composite surface modification technology, the design of the circuit based on Marx generator and adjusting the driving signal delay to make the IGBT switch not to turn on at the same time to obtain the stepped pulse high voltage output Thought, and verified its feasibility. The experimental results show that the circuit can output high voltage pulses with pulse peak voltage of 10 kV, peak current of 30 A, pulse width of 3 ~ 30 μs, pulse frequency of 20 ~ 500 Hz and maximum voltage order of 10 levels. 1 primary side, 10 secondary side structure driven high-voltage isolation transformers and delay drive circuit compact structure, anti-interference ability. IGBT-driven reverse bias pulse voltage to meet the IGBT fast turn-off and over-current protection requirements. The test results of the circuit characteristics under the plasma load show that the circuit can adapt to the actual working environment and provide technical support for the development of the composite processing technology. The circuit structure can be extended to higher pulse voltage output by Marx element stack.