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利用压电陶瓷逆压电效应研制成功了精密可控误差补偿微位移器.经试验测试,其静动态特性均达到理想程度,可以作为执行件用在刀具磨损、热变形以及主轴回转误差等补偿控制系统中,也可用作精密车床的微进给装置.
The precision and controllable error compensation micro-displacement device was successfully developed by using the piezoelectric ceramic inverse piezoelectric effect.The static and dynamic properties of the micro displacement device reached the ideal level after the test, which can be used as the execution part to compensate the tool wear, thermal deformation and spindle rotation error Control system can also be used as a micro-precision lathe feeding device.