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分别从理论和实验上研究了钛镆中氦泡演化对离子束背散射能谱(RBS)的影响。理论分析表明能谱的展宽除了受材料的能量阻止和多重散射效果及实验系统特性的影响外,氦泡也是一个重要的影响因素。理论上,当由离子束分析给出氦泡占材料的体积分数及氦泡引起的能散时,可计算出氦泡的尺寸和密度。实验结果显示了含氦钛镆RBS谱后沿随着氦浓度和退火温度的升高逐渐展宽,表明随着氦泡尺寸和浓度的变大,离子束分析能谱也不断展宽。这使在考虑了材料中氦泡的影响后,离子束分析能真实地反映材料的性质,同时也可从离子束分析得出材料中氦泡的演化信息。
The effects of helium bubble evolution on ion beam backscattering spectroscopy (RBS) were studied both theoretically and experimentally. Theoretical analysis shows that the energy spectrum broadening is not only affected by the energy of the material and the effect of multiple scattering and the experimental system, the helium bubble is also an important factor. In theory, the size and density of the helium bubble can be calculated when the helium bubble occupies the volume fraction of the material and the energy dissipation due to the helium bubble is given by ion beam analysis. The experimental results show that the RBS spectrum of helium-containing titanium 逐 broadens along with the increase of helium concentration and annealing temperature, which indicates that the energy spectrum of ion beam analysis broadens with the increase of helium bubble size and concentration. This makes the ion beam analysis can truly reflect the properties of the material after considering the influence of the helium bubble in the material, and at the same time, the evolution information of the helium bubble in the material can also be obtained from the ion beam analysis.