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日本工业科学与技术局的龟工实验室,用感应辉光放电法研制了一种含氢非晶硅薄膜太阳能电池。用此方法制得的非晶硅氢薄膜的性质与组成、气氛气体的压力和流速、高频放电电流的电压以及硅原子沉积的衬底温度有关。 该实验室还研究溅射法和辉光放电法。在最佳条件下制得的薄膜,其光电导(波长6328埃,光强300微瓦/厘米~2)约10~(-6)—10~(-4)欧姆~(-1)厘米~(-1)。 非晶硅中引入氢,除增加光敏性而外,还可以
Japan’s Industrial Science and Technology Bureau of Turtle workers laboratory, using induction glow discharge method developed a hydrogen-containing amorphous silicon thin-film solar cells. The properties of the amorphous silicon hydride thin film prepared by this method are related to the composition, the pressure and flow rate of the atmospheric gas, the voltage of the high-frequency discharge current, and the substrate temperature at which silicon atoms are deposited. The lab also studied sputtering and glow discharge processes. In the optimal conditions, the photoconductivity (wavelength 6328 angstroms, light intensity 300 microwatts / cm ~ 2) is about 10 ~ (-6) -10 ~ (-4) ohm ~ (-1) cm ~ (-1). The introduction of hydrogen in amorphous silicon, in addition to increase the photosensitivity, but also