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提出一种用于硅微机械谐振传感器研究的单光源激振测振新方法,即微谐振器的激励及其谐振信号的测量使用同一光源。该方法采用全光纤斐索干涉仪结构,将干涉信号与光源强度变化信号进行运算后,通过选频技术解调出谐振器的振动信息,同时采用贝塞耳函数比值法扩大了振动幅度的测量范围,省去了一些难以获得准确数值的工作参数的计算。采用该方法实现了微悬臂梁结构形式的谐振器件的单光源激振与测振,获得了器件的谐振频率约为8.81kHz以及谐振状态下的振动幅度约为135nm。实验结果与采用其他双光源激振测振方法基本一致,新方法的可行性得到了验证。
A new method of single-source excitation measurement is proposed for silicon micro-mechanical resonance sensor. The excitation of micro-resonator and the measurement of resonance signal use the same light source. In this method, an all-fiber Fizeau interferometer structure is adopted. After the interference signal and the light source intensity variation signal are operated, the vibration information of the resonator is demodulated by the frequency selection technique, and the measurement of the vibration amplitude is expanded by using the Bessel function ratio method Range, eliminating the need to obtain accurate numerical calculation of the working parameters. By using this method, the single light source excitation and vibration measurement of the resonant device with micro-cantilever structure were realized. The resonant frequency of the device was about 8.81kHz and the vibration amplitude was about 135nm under the resonant condition. The experimental results are basically the same as those obtained by using other dual-light source vibration excitation methods. The feasibility of the new method is verified.