本文通过对电子散斑小振幅振动测量的线性分析，实施一系列特殊算法、散斑平均技术及特殊图象处理等工作，使得纳米振动测量系统的测量精度得到较大提高．该系统将具有全场、非接触、测量速度快、测量精度高等优点，目前它也是纳米全场振动测量的唯一方法 In this paper, the linear analysis of small amplitude vibration measurement of electronic speckle, the implementation of a series of special algorithms, speckle averaging techniques and special image processing work, making the measurement accuracy of nano-vibration measurement system has been greatly improved. The system will have the whole audience, non-contact, fast measurement, high measurement accuracy, it is also the only way to measure the vibration of the whole field of nano