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针对原子力显微镜(AFM)微悬臂的柔性特征,提出了一种基于时空变量分离的模糊PID控制方法。由于AFM的微悬臂探针的运动精度非常高,对扰动很敏感,因而需建立微悬臂的分布参数系统模型。在保持柔性微悬臂的空间振动特性的基础上,将基于时空变量分离控制方法,结合鲁棒性强的模糊PID控制方法运用到AFM微悬臂探针的控制上,这样使控制器的设计不用考虑空间耦合的影响。通过实验仿真结果,这种方法有效地提高了AFM的微悬臂探针的控制性能和稳定性。
In view of the flexible characteristics of atomic cantilever AFM, a fuzzy PID control method based on spatio-temporal variable separation is proposed. Due to the very high accuracy of the AFM micro-cantilever probe and its sensitivity to perturbation, a distributed micro-cantilever parameterization model is needed. Based on the space vibration characteristics of flexible microcantilever, the control method based on space-time variable separation and the fuzzy PID control method with strong robustness are applied to the control of AFM micro-cantilever probe so that the design of controller is not considered The impact of space coupling. Through the experimental simulation results, this method effectively improves the control performance and stability of AFM micro-cantilever probe.