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采用新型等离子体浸没式离子注入技术，对Ｔｉ６Ａｌ４Ｖ合金进行氮离子注入．对注入层的成分、组织和性能的分析表明，注入层中氮浓度的分布具有类高斯分布特征，在注入层中有ＴｉＮ和非晶态相形成．注入层的显微硬度和摩擦性能得到了明显的改善．
A new type of plasma immersion ion implantation technology was used to implant nitrogen into Ti6Al4V alloy. Analysis of the composition, microstructure and properties of the implanted layer shows that the distribution of nitrogen concentration in the implanted layer has a Gaussian-like distribution, and TiN and amorphous phases are formed in the implanted layer. The microhardness and friction properties of the implanted layer have been significantly improved.