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在某一台設备上,要求移动体的微动量能控制在0.1微米左右。鉴于采用一般的調整机构,如差动螺絲、蝸輪蝸杆、斜楔、杠杆等都存在較大的摩擦、阻滞及变形等現象,很难达到要求,有时尽管在理論計算上看来不成問題,但在实际使用中却往往达不到預期的效果,而出現不均勻的跳动現象。为此,設計了一种簧片支点杠杆和变形板結合的微动机构,以使移动体的微动量稳定地控制在0.1微米,其中移动部分是用滾动軸承支承在导向导軌上的,它为灵敏地反映移动体的微动量創造了有利条件。
In a certain device, the requirements of mobile micro-momentum can be controlled at about 0.1 microns. In view of the general adjustment mechanism, such as differential screws, worm gear, wedges, levers and so there is a large friction, retardation and deformation and so on, it is difficult to meet the requirements, and sometimes in theory does not seem to be a problem , But in actual use, they often fail to achieve the expected results, while the phenomenon of uneven beating occurs. For this purpose, a jog mechanism in which a reed fulcrum lever and a deformable plate are combined is designed so that the amount of jerk of the moving body is stably controlled at 0.1 m, in which the moving portion is supported on the guide rail by a rolling bearing , Which creates favorable conditions for sensitively reflecting the micro-momentum of moving bodies.