本文探讨了在10-3毫巴(1微米)～大气压的真空范围内和指定的温度下以最小的污染对要求高的气体──高纯、稀有或危险性气体的抽除。对于在此范围产生的问题,其合理的解决手段就是一种变容真空泵──专用的罗茨真空泵,这种系工作室不需要润滑,转子与壳体之间无机械接触,但由于冷 This article examines the removal of highly demanding, noble, or hazardous gases with minimal contamination at vacuum ranges of 10-3 millibar (1 micron) to atmospheric pressure and at specified temperatures. A reasonable solution to the problems that arise in this area is a varactor vacuum pump, a dedicated Roots vacuum pump that does not require lubrication and does not have mechanical contact between the rotor and the housing. However, due to the cold