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采用化学共沉淀法制备ITO粉体前驱物,在600℃煅烧粉体前驱物4h,得到粒径为20~30nm的ITO粉体。添加1%的聚乙烯醇(PVA)造粒,模压成型制备ITO靶材素坯,设置不同的升温速率,在1550℃氧气氛下烧结素坯,得到ITO靶材。研究了烧结过程升温速率对ITO靶材密度和微观组织的影响。结果表明,在低温阶段(0~500℃)升温速率为3℃/min,高温阶段(500~1550℃)升温速率为8℃/min时,ITO靶材相对密度为99.58%,孔洞极少,近乎完全致密,且靶材宏观上无裂纹。
A chemical coprecipitation method was used to prepare the ITO powder precursor, and the powder precursor was calcined at 600 ° C. for 4 h to obtain an ITO powder with a particle size of 20-30 nm. 1% polyvinyl alcohol (PVA) was granulated, and the ITO target material blank was prepared by press molding. Different temperature increasing rates were set, and the green body was sintered under an oxygen atmosphere at 1550 DEG C to obtain an ITO target. The effect of the heating rate of sintering process on the density and microstructure of ITO target was studied. The results showed that the relative density of ITO target was 99.58% at a heating rate of 3 ℃ / min in the low temperature (0 ~ 500 ℃) and at a heating rate of 8 ℃ / min in the high temperature (500 ~ 1550 ℃) Nearly complete, and the target macroscopically no cracks.