研究了微陀螺的电容变化率为10-7～10-8时的微弱输出信号的检测技术,这是微机械器件研制中具有普遍性的技术难点。在研究检测微小电容变化量的积分电路的基础上,进一步采用了可抑制低频噪声和漂移的相关双采样技术,以及抑制由开关电荷注入引起的误差的技术。这些全新的技术思路和措施可望达到检测10-7～10-8的电容变化率的目的 The detection technology of the weak output signal when the rate of change of capacitance of the gyroscope is 10-7 ~ 10-8 has been studied, which is a common technical difficulty in the development of micromechanical devices. Based on the study of the integral circuit that detects the amount of change in small capacitance, the correlated double sampling technique that suppresses low frequency noise and drift and the technique that suppresses errors caused by switching charge injection are further used. These new technical ideas and measures are expected to achieve the purpose of detecting the capacitance change rate of 10-7 ~ 10-8