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本文介绍一种分析和测量薄膜的系统,在薄膜上激光的光输出分裂成两个光束,第一个光束集中照明摄影胶片的全区,而第二个光束准直后通过摄影胶片较小部分射到观察膜的样品上。样品的表面是相对于垂直第二光束的平面稍上倾斜,这样从样品反射出来的光线回到摄影胶片上时所达到的区域与第二光束最初通过它时的不同。通过材料沉积在样品表面上的期间内作两次相继曝光,在摄影胶片上录下全息图。然后把胶片显影,则干涉线条给出在曝光之间薄膜或沉积的材料的测量。
This article presents a system for analyzing and measuring thin films in which the laser light output is split into two beams, the first beam concentrating the entire area of the photographic film and the second beam passing through a smaller portion of the photographic film The sample was observed on the film. The surface of the sample is slightly tilted with respect to the plane perpendicular to the second light beam such that the area of the light reflected from the sample reaches the photographic film and is different from when the second light beam initially passes through it. Two consecutive exposures were made during the deposition of the material on the surface of the sample to record a hologram on the photographic film. The film is then developed, and the interference lines give a measure of the film or deposited material between exposures.