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声学换能与聚焦系统是扫描声学显微镜的主要部件.作者提出并研制成一种新型换能聚焦系统——玻璃金属球面换能器.它克服了过去常用的两种系统——Quate的单透镜及中钵宪贤的冲压成形球面换能的不足,具有避免杂散声场和分辨率高等优点,同时其结构与工艺适宜于在高达数百至数千兆赫的频率下实现.在本文中,作者描述了它的结构、工艺、理论分析及实验测量结果.
Acoustical transduction and focusing system is the main component of scanning acoustic microscope.The author proposed and developed a new type of focusing system - glass metal spherical transducer, which overcomes the two systems commonly used in the past - Quantate single lens and The lack of press-forming spherical transduction in the middle of the bowl by Kenzo has the advantage of avoiding stray sound fields and high resolution, while its structure and process are suitable for frequencies up to several hundred to several hundred megahertz In this article, the author describes Its structure, technology, theoretical analysis and experimental measurement results.