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In this paper, based on the principle of Arrayed Waveguide Grating (AWG) theory, some important parameters are optimized for polymer AWG around the central wavelength of 1.55? μm with the wavelength spacing of 1.6? nm . Then, a 9×9 polymer AWG is designed and the fabricating process are described. The cladding material is poly methyl methacrylate co glyciclyl methacrylate (PMMA GMA) and the core material is the mixture of PMMA GMA and bis phonel A epoxy. In order to obtain a better shape of the waveguide after the Reactive Ion Etching (RIE) using oxygen, an aluminum mask is used on polymer instead of conventional photoresist as mask in the fabrication process. The measuring results indicate that the fabricated optical waveguide achieves single mode transmission.
In this paper, based on the principle of Arrayed Waveguide Grating (AWG) theory, some important parameters are optimized for polymer AWG around the central wavelength of 1.55 μm with the wavelength spacing of 1.6 nm. Then, a 9 × 9 polymer AWG is designed and the fabricating process is described. The cladding material is poly methyl methacrylate co glyciclyl methacrylate (PMMA GMA) and the core material is the mixture of PMMA GMA and bis phonel A epoxy. In order to obtain a better shape of the waveguide after the Reactive Ion Etching (RIE) using oxygen, an aluminum mask is used on polymer instead of conventional photoresist as mask in the fabrication process. The measuring results indicate that the fabricated optical waveguide achieves single mode transmission.